[求助]衄壽sputter傲跳腔恀枙
<P>苤萊婓怢俜植岈膠傲俴珛,翋猁酕腔岆SDC摯EMI,
儂怢妏蚚inline sputter(DC power + 棠諷)
ゴ淝赽郣善珨跺恀枙,
婓傲跳腔奀緊匼第桶醱諂衄珨跺珨跺苤埴萸.
埮1-2mm湮苤,ブ甜準啞萸,
艘懂埻萸窒煦衄傲善,
筍臚綠掀〔坻窒煦猁情,
垀眕晇伎誕筏,
ワ恀跪弇湮肅,
涴岆妦繫埻秪倛傖腔儸?
扂眳ゴ羶郣徹濬侔袨錶.
遜咡祥醞硌諒, 郅郅!!!</P>
<P>ps.價第妏蚚腔岆mitsumishi rayon腔pmma film MR200
</P> 不知显示为什么内容！ <P>sorry,
i live in Taiwan,can't type GBK font.
and i don't know if you can view the Big5 font.
lately, i have some trouble w/ coating Cr on PMMA.
(pmma film is mitsumishi rayon MR200)
when coating Cr on PMMA.
there're many little spot on the substrate.
(r=0.5-1mm)
but it's not the white spot.
it's coated, too. butthickness seems thinner than other part.
can anybody tell me how to solve it??
i haven't meet this situation before.
thx!!</P><P>best regards :)
</P> 您所说的点是掉膜，还是膜层起包呢，您镀膜是用那种方式，还有您的成膜温度是多少？
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