新型光学零件的高精度加工方法：流体抛光,光学加工工艺及检测测试

badan 发表于 2007-3-19 20:42:00

新型光学零件的高精度加工方法：流体抛光

记得上大学的时候大学物理老师是做流体切割方面的研究的，受这个启发，我和另外一个同学曾经讨论过流体抛光光学零件的想法，不过也就所说而已，现在已经过去五六年了，这个叫做LightMachinery的公司却实现了这样一种抛光方式。The idea is straightforward: take a fluid that contains abrasive particles and force it in a jet onto the surface to be figured, passing the jet across the surface in an appropriate pattern. As the flow is diverted by the surface, the heaviest particles are driven outward, resulting in a donut-shaped removal area.（翻译出来就是：“原理很简单：将混有研磨颗粒的液体从喷头中喷像待成型的零件表面，喷头沿着零件表面做一定轨迹的平动。液体随着零件表面散开，比较重的颗粒也就随着液体向外散开，于是便加工出炸面圈形状的取出区域”）。根据这家公司网站上的描述，这种方法虽然比较慢，但是可以轻易获得面形Lamda/100的高精度表面，如下文所示。更加详细的内容可以参考Laser Focus World上面的文章： <a href="http://www.laserfocusworld.com/display_article/286499/12/ARTCL/none/News/OPTICAL-FABRICATION:-Fluid-jet-polisher-is-deterministic">http://www.laserfocusworld.com/display_article/286499/12/ARTCL/none/News/OPTICAL-FABRICATION:-Fluid-jet-polisher-is-deterministic</a>下文摘自LightMachineryFluid Jet Polishing <blockquote><img height="150" alt="Solid etalon used to tune a high power laser" src="http://www.lightmachinery.com/Fluid%20Jet%20Polishing%20Action.jpg" width="250" align="right" border="2" name="Image10"/><ul><li><a href="http://www.lightmachinery.com/Fluid-Jet-Polishing-Equipment.html">Fluid Jet Polishing Equipment</a></li><li><a href="http://www.lightmachinery.com/Fluid%20Jet%20Polishing.html#FJPFab">Component Fabrication </a></li><li><a href="http://www.lightmachinery.com/Fluid%20Jet%20Polishing.html#FJPFab">F</a><a href="http://www.lightmachinery.com/Fluid%20Jet%20Polishing.html#FJPTechnology">luid Jet Technology Development</a>
</li></ul>Fluid jet polishing is turning the world of optical fabrication upside down. Near perfect optical components can now be produced routinely using this cost effective, computer controlled technique. Fluid jet polishing enables LightMachinery to produce large surfaces with less than 10nm of rms surface variation. Fluid Jet technology has been applied to a wide variety of optical and semiconductor materials including Fused Silica, BK7, Crystal Quartz, Silicon, Germanium, Zinc Selenide, Calcium Fluoride and Magnesium Fluoride.Our proprietary fluid jet polishing technology utilizes a fine stream of slurry to remove nanometers of material, slowly and accurately. Advanced software developed by LightMachinery enables the correction of wavefront errors to achieve surfaces that are very close to perfect. Fluid jet polishing is enabling optical, nanostructural and semiconductor projects that were previously considered to be impossible including; arbitrary surface patterns and correction plates, micro-channels, thin ultra-uniform thickness substrates and near perfect optical components</blockquote><blockquote><a href="http://www.lightmachinery.com/Fluid-Jet-Polishing-Equipment.html">Fluid Jet Polishing Equipment</a><a name="FJPEquipment"></a><a href="http://www.lightmachinery.com/Fluid-Jet-Polishing-Equipment.html"><img height="165" alt="Fluid Jet Polishing" src="http://www.lightmachinery.com/fjp1150F-250x150.jpg" width="250" align="right" border="2"/></a> Introducing the <a href="http://www.lightmachinery.com/Fluid-Jet-Polishing-Equipment.html">FJP-1150F</a>; simple to use, just measure your current shape, enter a target shape and click Go!. Our ultra-high reliability polishing equipment is designed to polish a wide variety of materials to unprecedented precision. Our fluid jet polishing equipment will accept a wide variety of polishing fluids, even customer supplied slurries. <a href="http://www.lightmachinery.com/Fluid-Jet-Polishing-Equipment.html">Click here to learn much more about our Fluid Jet Polishing Equipment.</a> Component Fabrication <a name="FJPFab"></a><img height="149" alt="Fluid Jet Polishing" src="http://www.lightmachinery.com/solid%20etalons%20two%20wavelengths.jpg" width="250" align="right" border="2"/> Fluid jet polishing is an enabling technology that enables LightMachinery to tackle some very complex and difficult optical fabrication tasks with confidence. In particular the ability to maintain the shape a flatness of very components with very thin aspect ratios has allowed LightMachinery to fabricate very uniform thin <a href="http://www.lightmachinery.com/fabry-perot-etalons.html">etalons</a> and <a href="http://www.lightmachinery.com/uniform-thickness-wafers.html">wafers</a>. The ability to measure the final performance of complex assemblies such as <a href="http://www.lightmachinery.com/michelson-interferometers.html">Michelson Interferometers</a> and then to make arbitrary surface corrections to these components is opening up a new era of astronomical device manufacture. <a href="http://www.lightmachinery.com/Fluid%20Jet%20Polishing.html#etalonquoterequestform">Contact us</a> to discuss your requirements Fluid Jet Polishing Technology Development <a id="FJPTechnology" name="FJPTechnology"></a><img height="150" alt="Fluid Jet Polishing" src="http://www.lightmachinery.com/2-micro-channels-silicon.jpg" width="250" align="right" border="2"/> Perhaps your application is outside the world of conventional optical polishing. We are still here to help. Fluid jet polishing is capable to smoothing and adjusting a very wide range of materials from metals to Silicon Carbide. Please <a href="http://www.lightmachinery.com/Fluid%20Jet%20Polishing.html#etalonquoterequestform">contact us</a> to discuss you application and we will be glad to work with you on finding a solution. If your application requires truly flat smooth surfaces, uniform thickness or surfaces with arbitrary shapes then <a href="http://www.lightmachinery.com/Fluid%20Jet%20Polishing.html#etalonquoterequestform">contact</a> our staff to discuss your needs.<table bordercolor="#999999" height="776" width="530" border="0"><tbody><tr><td width="255" height="127"><img height="150" alt="Before 60nm wedge" src="http://www.lightmachinery.com/before.jpg" width="250" align="top" border="2"/></td><td valign="middle" width="265" height="127">Conventional Flatness λ/10 Shown here a conventionally polished fused silica substrate. The wedge in the part is very good, about 50nm, less than lambda/10</td></tr><tr><td height="127"><img height="150" alt="After" src="http://www.lightmachinery.com/after.jpg" width="250" border="2"/></td><td valign="middle" height="127">Fluid Jet Polished Flatness λ/100 After processing half of the part with fluid jet polishing. The surface flatness is reduced about 6nm peak to valley or lambda/100</td></tr><tr><td height="127"><img height="150" alt="Surface roughness" src="http://www.lightmachinery.com/afm-conv-polished-substrate.jpg" width="250" border="2"/></td><td valign="middle" height="127">Atomic force microscope analysis of a conventionally polished fused silica surface. The size of the area is 1.5 x 2.5 microns. Surface roughness is 1nm Rms
</td></tr><tr><td height="127"><img height="150" alt="Surface roughness" src="http://www.lightmachinery.com/afm-cnc-polished-substrate.jpg" width="250" border="2"/></td><td valign="middle" height="127">Atomic force microscope analysis of a cnc polished fused silica surface. The size of the area is 1.5 x 2.5 microns. Surface roughness is 1nm Rms
</td></tr><tr><td height="127"><img height="150" alt="Microchannels" src="http://www.lightmachinery.com/2-micro-channels-silicon.jpg" width="250" border="2"/></td><td valign="middle" height="127">Micro-channels and complex patterns can also be created by combining fluid jet polishing with masking. These shallow microchannels are about 20nm deep and more than 1000nm wide (the vertical axis is greatly expanded) </td></tr><tr><td height="127"><img height="150" alt="microchannels" src="http://www.lightmachinery.com/micro-channel-silicon-end-view.jpg" width="250" border="2"/></td><td valign="middle" height="127">Looking down a 20nm deep micro-channel 1micron wide </td></tr></tbody></table> Deterministic Polishing (If we can measure, we can make it)<img height="149" alt="Solid etalon used to tune a high power laser" src="http://www.lightmachinery.com/solid%20etalons%20two%20wavelengths.jpg" width="250" align="right" border="2" name="Image10"/>The key to manufacturing optical components is measurement technology. Once a component can be measured and mapped then the fluid jet technology can be applied to remove any errors from the desired shape. The correction ability of our fluid jet system is at the same level of our Zygo interferometer and other measurement capability. So "if it can be measured then it can be made". Sometimes components need to be corrected for other parameters such as phase errors or polarization. In these cases specialized measurement and mapping techniques need to be used to map out the parameters then the fluid jet technology can again be put to work to perfect the component.LightMachinery is constantly investing in the research and development of manufacturing technology. This investment has resulted in a variety of new technologies including;<ul><li>New metrology systems for measuring substrate uniformity and surface flatness</li><li>Polarization mapping systems for measuring the retardance uniformity of large wave plates </li><li>In-situ tunable etalon measurement systems</li><li>Computer controlled fluid jet polishing technology </li></ul>We would also like to thank the people at the National Research Council of Canada for their assistance on our RD programs. The support of the groups at the Institute for Materials Science, Industry Partnership Facility and the Industrial Research Assistance Program has been of enourmous value. Information or Quote Request<a name="etalonquoterequestform"></a> Just fill out the form below to send us your quote request or<a href="mailto:enquiry@lightmachinery.com"> click here to send us an email </a>and you can attach a drawing. </blockquote>

一本假正经 发表于 2007-3-20 07:28:00

我认为这个现在还不是太成熟，好像一般也就达到修抛的水平，在预抛光的基础上取得更好的面型及光洁度。一般是磁流体和射流两种吧，我记得上次德国人来来推销的时候射流主要还是只作为抛光机中的一个部件使用，可见其加工效率........

mincailiu 发表于 2007-3-21 05:00:00

已经有成熟设备卖了

一本假正经 发表于 2007-3-21 06:06:00

有设备卖不代表成熟........

fcyfjh 发表于 2012-7-10 08:47:57

是个可以研究的技术

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新型光学零件的高精度加工方法：流体抛光