低温泵和低温水气泵----英文地！

ventura

The cryopumps are external to the system, they are extremely conductance restricted. The speed rate of a 1 inch cryopumps is about 15,000 l/s. But they must be isolated by elbows gate valves, etc. (They also need to be thermally isolated in many cases by elbows, baffles, etc.) Due to the conductance restrictions of the gate valves, elbows, etc., Cryopumps generally yield a net pumping spped of only a few thousand l/s. A major disadvantage of cryopunp is that they can not be used to pump gases that are toxic or explosive. They also can not be used with gases such as certain organics which will foul the charcal array. Water vapor is usually 90% of the gas load in pumping to base vacuum. Therefore the water vapor pumping spped should be at least 10X the dry gas pumping speed.As the net pumping speed for cryopump is f order of 300 l/s or less, the water vapor pumping speed should be of the order of 30,000 l/s. These water vapor pumping speed are only accomplished with cryopump with in chamber cryocoil.Cryopumps are the perfect compliment to cryopump in order to achieve balanced pumping speeds for water vapor and dry gases( so that either is rate limited)

gaelicjzero

看不懂呀，我！