Fringe sensitivity range: continuously variable from 0.5 to 10 micrometers/fringe
System accuracy: 0.25 micrometers
Maximum test area: 5.0" x 4.5" (major x minor axes)
Maximum resolution: 0.10 micrometers
Work holder: tilt adjustable in 2 dimensions; accomodates 4 x 4", 5 x 5" photoplates
as well as 2", 3", 100mm, and 200mm wafers and slices.
Viewing screen: RCA bw CCTV monitor with 9" CRT
Light source: HeNe laser
Power input: 67 watts